ZYGO ZMI-4004 measuring board

ZYGO ZMI-4004 is a 6U VME64x four axis laser interferometry measurement board, a precision displacement acquisition board for semiconductor lithography machines, which processes interferometric optical signals and outputs nanometer level position feedback ZYGO.
Characteristics
1. Four axis synchronous acquisition, built-in cyclic error correction, suppresses nonlinear errors in interferometric measurements
2. Nano level position resolution, maintaining measurement stability even under high-speed motion conditions
3. Optical signal input, compatible with ZMI series laser interferometer head, compatible with 7702/7714 laser sources
4. VME64x standard board, multiple board stacking can expand up to 64 measurement axes
5. Metal reinforced board, suitable for long-term uninterrupted operation of equipment cabinets

parameter
1. Single board 4 measurement axis, position resolution 0.15nm, maximum measurement speed ± 2.55m/sZYGO
2. Measurement accuracy at high speed with a σ value of 0.2nm and a minimum received optical power of 1.0 µ WZYGO
3. 6U VME64x bus interface, cabinet backplane power supply
4. Onboard signal processing unit, outputting position data to the motion servo system
5. Working temperature 0-55 ℃
Application
1. Feedback on multi axis displacement measurement of lithography machine wafer stage and mask stage
2. Semiconductor Precision Motion Platform Interference Measurement System
3. Replacement and maintenance of spare parts for ZYGO interferometric measurement system
4. Hardware maintenance of high-precision optical detection equipment
5. Imported precision equipment technology upgrade replacement parts

When there is positioning deviation or interference reading jump loss on the workbench, ZYGO ZMI-4004 is the priority measurement board component for verification.