Zygo ZMI-2002 8020-0211 Dual axis Measurement Board  

#Zygo ZMI-2002 8020-0211 Dual axis Measurement Board

This Zygo ZMI-2002 8020-0211 is a laser interferometer paired with a 6U VME bus dual axis measurement board, used for nanoscale displacement acquisition and maintenance spare parts for semiconductor precision motion table equipment.
Product Features

1. Dual axis synchronous acquisition, relying on heterodyne interferometry technology to achieve sub nanometer level position resolution
2. Real time signal demodulation, capable of simultaneously outputting displacement and velocity measurement data
3. Comes with non-linear error correction to reduce inherent bias in optical measurement systems
4. VME slot type board, which can be stacked multiple times to expand more measurement axes
5. onboard signal preprocessing, anti environmental interference, ensuring stable measurement during high-speed motion
Product Specifications
6. Compatible with Zygo ZMI series laser interferometer head
7. VME64 bus interface, 6U board specifications
8. Dual axis independent channel, high-speed sampling processing
9. Complete parameter configuration and data reading with supporting upper software
10. Industrial temperature control environment operation, suitable for precision equipment cabinets
Product Application
11. Feedback on the position of the wafer cone of semiconductor lithography machines and detection machines
12. High precision gantry motion platform closed-loop position measurement
13. Optical precision detection equipment displacement monitoring
14. Replacement of spare parts for ZMI laser interferometry measurement system board